| 摘要 |
PURPOSE:To shield alpha rays generated from the side wall faces of a vessel and to prevent soft error of a semiconductor device by a method wherein in the semiconductor element accommodating vessel having a cover to seal air-tightly, an inside cover having partition plates to partition off the side faces of a semiconductor element from the inside wall faces of the vessel facing with the side faces of the element is arranged over the semiconductor element. CONSTITUTION:The inside cover 100 to cover the surface of the element for shielding from alpha rays arranged between the semiconductor element 11 and are cover 14 for air-tight sealing. The inside cover is a metal plate or foil of 300mum-0.1mum thickness of Kovar, aluminum, etc., extended parts 101 thereof in the longitudinal direction of the element are supported by step parts 12A provided in the vessel 12. The inside cover is accommodated in the vessel, and has the partition plates 102 on the sides of the element 11 in parallel with the element to partition off the side faces of the element from the inside wall faces of the vessel facing with the side faces of the element. Accordingly, the alpha rays generated from the side wall faces of the vessel are obstructed by the inside cover and the partition plates, and soft error of the semiconductor element is prevented. |
