| 摘要 |
PURPOSE:To make uniform an ultraviolet ray irradiation in a laser discharge space by forming one of main discharge electrode pair in a mesh structure, and providing a plurality of auxiliary discharge electrode pairs through the main discharge electrode of the mesh structure outside the laser discharge space. CONSTITUTION:A main discharge electrode for a laser discharge is composed of a platelike electrode 1 and an electrode 1c of a mesh structure, a plurality of auxiliary discharge electrodes 2, 2c for generating an ultraviolet ray are disposed outside the electrode 1c of the mesh structure. With this configuration, an ultraviolet ray by the discharge between the electrodes 2 and 2c for generating the ultraviolet ray is actually applied through the electrode 1c of the mesh structure uniformly to the laser discharge space between the electrodes 1 and 1c for discharging a laser. |
