| 摘要 |
PURPOSE:To accomplish a positive bonding by mounting a collet carrier having a collet securely fitted thereinto at the tip of an auxiliary arm provided ritatably on a bonding arm of a pellet bonder through a spherical seat. CONSTITUTION:An auxiliary arm 32 is mounted to a bonding arm 1 provided on a longitudinally sliking rod 3 of a pellet bonder with a vertically oscillating arm 21 by way of a support piece 4. A collet carrier 34 having a collect 8 securely fitted thereinto with a pellet 7 is fixed rotatively at the tip thereof with a lock bolt through the joint with the auxiliary arm made spherical and the arm is driven to vacuum suck a substrate 5 on a table 6. This allows the collet to be maintained at a desired attitude thereby assuring a positive pellet bonding while improving the yield without inflicting damage to the pellet. |
