| 摘要 |
PURPOSE:To raise detection sensitivity for high pressure by sealing a non-compressible liquid inside a chamber closed with pressure receiving elements where the same pressure to be measured is given from both directions and by providing an absorbing means for pressure to be applied to it. CONSTITUTION:Pressure P to be measured is applied to pressure receiving elements 10, 11 through a pressure introducing hole 27 on a flange 25 at the side surface of a main body 1. The area of the pressure receiving element 10 is slightly larger than that of the pressure receiving element 11. The pressure receiving elements 10, 11 are composed of bellows, etc., and contracted by external force, thereby permitting a coupling rod 7 to move in the right direction. A moving electrode 14 fixed at the central part of the coupling rod 7 moves in the right direction against a plate spring 12 and pressure P is estimated from changes in electrostatic capacity with respect to the fixed electrodes 17, 18. At the time, a liguid is sealed in the chamber closed by pressure receiving elements 10, 11 and the pressure changes are absorbed by the bellows provided in communication to the upper part. Through this process detection sensitivity of high pressure P is improved. |
