| 摘要 |
PURPOSE:To prevent the contamination of the object to be dried by squeezing an exhausting pipe for gas or liquid, providing separating plates in cartidge containers, and providing reverse-flow-blocking plates at the upper part. CONSTITUTION:Plates 19 are provided on separating plate 9 in the cartridge container 9. The upper parts are covered by plates 20, and the unused space is blocked. Plates 21 are placed on the top surface of containers 10 in the cartidges 12, and the upward reversal of the gas which is jetted from a pipe 14 to the center of a case 1 is prevented. An exhausting tube 15 is not connected to a forced exhausting duct. The shape of the tube 15 is squeezed in the middle, and the reversal of the splash is the tube 15 can be prevented. The tip of the tube is connected to a water exhausting pipe. In this constitution, N2 is sent from the pipe 14, a rotary body 5 is rotated by a motor 6 to dry the contents, and wafers can be dried without contamination. |
