| 摘要 |
PURPOSE:To form an insulating film between aluminum conductors and to flatten its surface, by anodizing part of each aluminum conductor during the manufacture of a thin-film magnetic head. CONSTITUTION:Over a ceramic substrate 1, a multilayer thin film consisting of a lower magnetic material 2, a lower insulating film 3, aluminum conductor films 6 and 7, and a masking material titanium 11 in this order is formed by vapor deposition, sputtering, plating, etc., and this film is photoetched to a depth about a half the total film thickness of titanium 11 and aluminum conductors 6 and 7. The whole substrate is dipped in an electrolytic bath, such as an oxalic acid bath and a sulfuric acid bath, and then applied with a DC voltage to anodize the conductors 6 and 7. Although the conductors 6 and 7 are not anodized because of the masking of titanium 11, the aluminum surfaces in contact with the electrolyte are anodized to turn into alumina 12, or insulators. As the electrolysis advances, the alumina becomes as high as the surface of titanium 11 to flatten the surface. Then, an upper insulating film 4 and an upper magnetic body 5 are formed. |
