发明名称 |
THIN FILM STRUCTURE FOR CERAMIC SUBSTRATES. |
摘要 |
A thin film structure is provided with the capability of low-power laser tuning and trimming. Trim windows in a plated ground plane are incorporated to allow automated tuning procedures using relatively low-power lasers. The trim windows are conductive, but the heavier layer of plated copper is omitted from those areas, leaving only the titanium/evaporated copper/ gold layers. The method can also provide for areas of bare substrate if desired. |
申请公布号 |
EP0037421(A4) |
申请公布日期 |
1982.01.26 |
申请号 |
EP19800902196 |
申请日期 |
1981.04.21 |
申请人 |
MOTOROLA, INC. |
发明人 |
BEDARD, BRIAN ERNEST;GELLER, GARY ROBERT |
分类号 |
H01L21/268;H01L27/01;H01P1/203;H01P1/205;H01P3/08;H01P11/00;H05K1/00;H05K1/03;H05K3/02;H05K3/38;(IPC1-7):H01P3/08 |
主分类号 |
H01L21/268 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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