| 摘要 |
PURPOSE:To make a monolithic construction ideal for a substrate carrying elements or a container housing them by laminating three separate layers made of metal selected from specified groops of metals on the surface of a silicon carbide in said order. CONSTITUTION:In a monilitic construction of ceramics used for a carrier substrate or a container, a sintered body in which a small amount (for example, about ...%) of beryllium oxide or boron oxide is added to silicon carbide is used for the ceramics. Metals to be laminated are separately selected from a group of Ti, Cr, Mo, W, and Al for the first layer, a group of Cu, Ni, Pd and Pt for the second layer, and a group of Au, Ag and Pt for the third layer. They are applied in said order, for example, by evaporation, sputtering or the like. For example, said silicon carbide plate 1 is provided with said metal layers 2-5, on which a chip 7 is bonded through a solder layer 6. With such an arrangement, an element or a device is obtained excellent in the electrical insulation and heat radiation along with a large adhesivity. |
