| 摘要 |
PURPOSE:To perform eutectic reaction uniformly and to increase a yield rate by flowing air to a mounting part of a package, sensing the inclination by said pressure, and adjusting the mounting part and the pellet surface by the sensed signal. CONSTITUTION:Before the package 26 is mounted on a heat block 38, air is blown to a plurality of positions of the mounting part 28 from a plurality of sensing nozzles 18 provided in a sensing mechanism 16. Said blowing pressure is piezoelectrically converted, the electric signal is processed, and the inclination and the height of the mounting part is calculated. The heat block 38 is supported by a rotary shaft 44 of a support 42 so that the block 38 can be rorated on the Y axis. The support 42 is supported by a support 46 so that the support 42 can be rotated on the X axis. When the package 26 is mounted, a lever 50 is actuated by the signal sent from a processor 36, and the mounting part 26 is adjusted so that it is aligned in parallel with the lower surface of the pellet sucked by the collet. In this constitution, the pellet can be intimately contacted and the irregularity or the poor part of eutectic which may cause cracks can be avoided. |
