| 摘要 |
PURPOSE:To prevent a superconductive characteristic from being deteriorated, by forming a corrosion-proof layer, which is made of a stable material having no reactivity to both a superconductor and ingredients contained in the atmosphere, on a surface of an oxide group superconductor. CONSTITUTION:A target T1 is made of a superconductive material which is formed by blending La, Sr, Cu, O in respective prescribed compositions and this target T1 is disposed in a sputtering device, and next high-frequency magnetron sputtering is performed in an atmosphere of Ar gas + O2 gas, and thus a superconductive thin film 2 is formed on a substrate 1. A corrosion-proof layer material of Pt or the like is prepared for a target T2, and this target T2 is disposed in a sputtering device, and also sputtering is performed to form a corrosion-proof layer 3 of Pt on the superconductive thin film 2. Oxygen atoms are not drawn out from the superconductive thin film 2 in the atmosphere, and its superconductive characteristic of a critical temperature or the like is not prevented from being deteriorated. Further, the superconductive thin film 2 can be prevented from reacting to water and carbon dioxide which are contained in the atmosphere, and also alteration and deterioration of the superconductive thin film 2 do not almost occur accordingly. |
