| 摘要 |
PURPOSE:To shorten figure-drawing time, by generating plural rectangular-section electron beams at a time by making combination of plural slits and drawing plural patterns at a time. CONSTITUTION:An electron beam 21 emitted from an electron gun 20 provided on vacuum container 19 is intermitted by a beam blanker 22 and made to pass through slits 24 and 25. Kinds and numbers of slits to which the beam is applied are selected by deflectors 26 and 27 and plural rectangular-shape beams are applied. Synchronously with this forming motion, a signal is given from a controller 34 to a deflector 28, beam is vertically applied to the center of a reducing lens 29 and projected on a material 31. Further, the signal from the controller 34 is given to a deflector 30 to determine the position of figure drawing. And then, a stage 32 is shifted by a driving device 33, and figure starts being drawn on an entire surface of the work 31. |
