发明名称 |
High resolution soft x-ray or ion beam lithographic mask |
摘要 |
A lithographic process utilizing soft x-rays or ions to achieve high resolution is disclosed. The process is particularly useful and semiconductor processing where high resolution is required to achieve a high density. The process utilizes a mask to selectively expose a photoresist to soft x-rays of flood beams of ions. The mask comprises a thin metallic foil supported by a frame such that the foil is in tension. The frame includes optical alignment keys. A second patterned layer of metal is affixed to the foil to form areas which are non-transparent to the soft x-rays or flood ion beams for delineating the elements of a semiconductor circuit, for example. This permits the mask to be optically aligned using conventionally techniques with high resolution being achieved due to the short wavelength of the x-ray radiation or the ion beams.
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申请公布号 |
US4454209(A) |
申请公布日期 |
1984.06.12 |
申请号 |
US19830459286 |
申请日期 |
1983.01.19 |
申请人 |
WESTINGHOUSE ELECTRIC CORP. |
发明人 |
BLAIS, PHILLIP D. |
分类号 |
G03F1/14;G03F9/00;(IPC1-7):G03F9/00;G03F1/00 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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地址 |
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