| 摘要 |
PURPOSE:To obtain liquefied carbon dioxide gas having a purity higher than a specific level, by flushing liquefied carbon dioxide gas in a purification tank under reduced pressure, and further flushing the liquid in the tank to the gaseous phase repeatedly, thereby removing the impurity gas together with the vaporized carbon dioxide gas. CONSTITUTION:Carbon dioxide gas is transferred through the active charcoal reservior 3, the desiccator 4, and the deodorizer 5, and liquefied in the carbon dioxide gas condenser 6. The liquefied carbon dioxide gas introduced from the condenser 6 through the pipe 9 to the space above the surface of the liquefied carbon dioxide gas 10 in the purification tank 8, and flushed to vaporize the impurities. The liquefied carbon dioxide gas 10 is circulated by the circulation pump 14 and flushed into the gaseous phase in the tank 8 through the pipe 13. By the flushing under reduced pressure and the circulated flushing, the impurity gas is removed together with the gasified carbon dioxide gas, leaving liquefied carbon dioxide gas having a purity of >=99.99%. |
