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发明名称
INVESTIGATION OF ASTIGMATISM IN ELECTRON BEAM PROBE INSTRUMENTS
摘要
申请公布号
GB2002547(B)
申请公布日期
1982.01.20
申请号
GB19780031194
申请日期
1978.07.26
申请人
TEE W;SMITH K
发明人
分类号
H01J37/153;(IPC1-7):G05B13/02;H01J37/26
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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