| 摘要 |
PURPOSE:To obtain an X-ray image of good quality simply and in an extremely short time through electronic scanning even in the case of a low magnification for observation by two-dimensionally convoluting signals provided by an X-ray detector during the scanning operation. CONSTITUTION:With a fixed position of a specimen irradiated by an electron beam 2, the angle of an X-ray spectroscope is scanned to detect the X-rays which are produced by the specimen during the scanning operation and are conducted through the X-ray spectroscope. The electron beam 2 advancing without undergoing polarization is projected on the specimen. According to sweeping on the fixed axis L of a spectral crystal 13, signals detected by a detector 14 are sent to an electronic computer 9. The computer 9 calculates a half-amplitude level W which is represented by the l-coordinate of the signals and calculates, on the basis of set information of observation magnification a position on the fixed axis L and necessary steps of the half-amplitude level W of intermittent movement. The spectral crystal 13 is moved automatically and intermittently by the number of steps calculated by the computer 9 by the half-amplitude level W. Every time after the completion of the movement, the specimen 1 is scanned by one field by the electron beam 2. |
