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发明名称
摘要
申请公布号
JPS573181(B2)
申请公布日期
1982.01.20
申请号
JP19730068289
申请日期
1973.06.19
申请人
发明人
分类号
H01J9/233;H01J9/02;H01J9/12
主分类号
H01J9/233
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代理人
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