| 摘要 |
PURPOSE:To evaporate the selenium light sensitive material so as not to form irregularity by flowing purified gas to the surface of a conductive base body which is mounted to the apparatus by a blower, sucking blown gas by a sucking device, and removing dust on the base body. CONSTITUTION:The base body 2 comprising an Al blank pipe is mounted on a mandrel 1 in the evaporating apparatus. In this apparatus, are provided the blower 3 having needle shaped electrodes 4 and the sucking device 5. Under the state an AC voltage is applied on the electrodes 4 and the base body 2 and discharging is made, e.g., purified air from which dust is removed is blown to the base body 2 by the blower 3. The blown air and the dust attached on the base body are sucked by the sucking device 5. Said blower 3 and the sucking device 5 are moved together in the longitudinal direction of the base body 2. Or many needle shaped electrodes, blowing holes, and sucking holes are arranged over the range along the length of the base body 2. Thus dust is removed from the entire surface of the base plate, thereby accomplishing purification. In this constitution, formation of irregularities on the evaporated film can be prevented, and an excellent yield rate can be obtained. |
