| 摘要 |
Apparatus for providing a controlled dynamically programmable RF power level to the real part of a terminating load which may vary in impedance over a wide range. Immitance monitoring apparatus produces vector signals representing instantaneous measurements of the voltage and current of an RF signal supplied to a load by an RF generator. These signals which contain information on the phase relationship between the voltage and current are appropriately processed and then multiplied to produce a DC signal which represents the power of the RF signal. The DC signal is employed to control the gain of a variable gain RF amplifier connected between the RF generator and the immittance monitoring apparatus. A feedback control loop is thus provided which controls the power of the RF signal supplied to the load. By amplifying, or attenuating, the signals present at some point in the control loop, the amount of power delivered to the load may be selectively varied.
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