| 摘要 |
PURPOSE:To produce magnetic bubble elements easily and economically while increasing the adhesion between a thin insulating film and a permalloy thin film formed on the thin insulating film. CONSTITUTION:On a garnet film 3 for bubbles, a thin insulating film 4 and an SiO2 thin film are formed by RF sputtering and one them, a thin conductor film 5 of AI-Cu is also formed. Then, the thin conductor film 5 is patterned and an SiO2 film is formed as a thin insulating film 1 by RF sputtering. After the body is washed with pure water, an SiO2 film is formed as a thin insulating film 2 by vacuum deposition. Then, a permalloy thin film 6 is formed in the same vacuum system and patterned. |
