METHOD OF PERFORMING ELLIPSOMETRIC MEASUREMENTS,申请号SU19833582197-传众专利搜索

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发明名称	METHOD OF PERFORMING ELLIPSOMETRIC MEASUREMENTS
摘要
申请公布号	SU1288558(A1)	申请公布日期	1987.02.07
申请号	SU19833582197	申请日期	1983.04.20
申请人	INST RADIOTEKH ELEKTRON	发明人	KOVALEV VITALIJ I,SU;ELINSON MORDUKH I,SU
分类号	G01N21/21	主分类号	G01N21/21
代理机构		代理人
主权项
地址

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