发明名称 MEASURING DEVICE FOR DEGREE OF VACUUM
摘要 PURPOSE:To maintain the accuracy of measurement and save the labor for disassembling by rushing air into a vacuum device through a small sized air lead-in tube provided near the gage port of a gage mounting and connecting pipe connected to a vacuum valve communicating with said vacuum device thereby maintaining a gage terminal clean. CONSTITUTION:A vacuum device 1 is connected to a gage port 9 through a conduit 2 for measuring the degree of vacuum, a vacuum valve 3 and a pipe 4 for connecting a gage. A terminal 10 for measuring the degree of vacuum is provided in the port 9. A nozzle 8 having ejector effect is provided near the port 9, and rush-in of air is made possible by a small sized air lead-in valve 7. At the time of putting the inside of the device 1 under atmospheric pressure, the valve 7 is opened for a short time prior to opening of a large sized air lead-in valve 12 to allow air to rush in through the nozzle 8, thereby blowing the dust stuck and accumulated near the port 9 toward the device 1 and cleaning the same. After this, the valve 3 is closed and the valve 12 is opened. Thereby, the accuracy of measurement is maintained without disassembling and cleaning the device every time.
申请公布号 JPS578428(A) 申请公布日期 1982.01.16
申请号 JP19800084439 申请日期 1980.06.19
申请人 TOA SEIKI KOUSAKUSHIYO KK 发明人 YAMAZOE MASAO
分类号 G01L21/00;(IPC1-7):01L21/00 主分类号 G01L21/00
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