| 摘要 |
PURPOSE:To protect a contact against an electrostatic breakdown so that a large quantity of current flows by providing an aluminum electrode film in contact with a polysilicon film via a contact hole of the shape for surrounding a bonding pad hole covered with an insulating film on the polysilicon film under the pad hole. CONSTITUTION:A polysilicon 3 is wired in an arbitrary width to surround a bonding pad hole 2, aluminum 1 is deposited thereon, and a phosphorus glass (DSG) of the hole 2 is etched. Many aluminum-polysilicon contacts 4 are provided around the hole 2. Since many contacts 4 can be provided around the hole 2, a current amount concentrated on the contacting surfaces of the one aluminum-polysilicon contact 4 is reduced to decrease a current resistance value to the contacting surface. |
