| 摘要 |
PURPOSE:To achieve stable detection of the IG chip pattern position for hybrid ICs by determining the position of the pattern edge on a majority basis depending on a binary signal of a pattern image taken in the optical system. CONSTITUTION:For example, a bonding pad pattern 23 of an IC chip 20 set up in a hybrid IC is taken in the optical system 3. The video output thereof is binarized by a preprocessing circuit 6 and inputted into a two-dimensional memory 31. Counters 32 and 33 scan the image pattern at a specified prespecified frequency (m, n) in the directions of X and Y (lines and rows) to add bits for each line and row. The calculated values are inputted into comparators 34 and 35 to be compared with the reference values whereby the edge position of the pattern 23 is determined. The position and the inclination of a chip pattern can be computed at a high accuracy, for example, by obtaining such positional information on the pad at the left upper most end and the right lowest end of an IC chip. |
