摘要 |
PURPOSE:To enable an easy measurement of a profile of a convex surface without making contact, by a method wherein a laser light source 2 and a half mirror 3, which points to a given direction, are united monolithically on a radius vector of an x y coordinate in which a profile of a convex surface to be measured coincides with an x y surface to be pivotably positioned. CONSTITUTION:A laser light source 2 and a half mirror 3 are monolithically united on a radius vector of an x y coordinate in which a profile of a convex surface to be measured coincides with an x y surface, and are located so that they can revolve around the origin 0. The half-mirror 3 crosses the x y surface at right angles, and can move in parallel on the radius vector in a manner to tilt at an angle of 45 deg. to a laser beam (the radius vector) LB. The half-mirror reflects the laser beam which is incident on the profile 1A of the convex surface. Through the parallel movement of the half-mirror 3, the coincidence of an incident beam with a reflection beam is detected by means of a half-mirror 4 and a sensor 5, and a coordinate P (x1, y1) of an incident point is found from values of a current angle theta, and current distance L and l. The repeat of said operations permits the easy measurement of the profile 1A of the convex surface in a noncontact manner. |