Cathode vaporiser for plasma source - uses arc struck between rod-shaped anode inside stacked cathode-material rings,申请号DE19803023672-传众专利搜索

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发明名称	Cathode vaporiser for plasma source - uses arc struck between rod-shaped anode inside stacked cathode-material rings
摘要
申请公布号	DE3023672(A1)	申请公布日期	1982.01.14
申请号	DE19803023672	申请日期	1980.06.25
申请人	DEUTSCHE FORSCHUNGS- UND VERSUCHSANSTALT FUER LUFT- UND RAUMFAHRT E.V.	发明人	MAILAENDER,MARTIN,DIPL.-PHYS.DR.
分类号	B23K9/08;C23C14/32;H05B7/18;H05H1/40;(IPC1-7):05H1/40	主分类号	B23K9/08
代理机构		代理人
主权项
地址

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