发明名称 |
Manufacture of a group of infra-red detector elements, and a group so manufactured |
摘要 |
A group of infra-red radiation detector elements are manufactured from a body (21) of infra-red sensitive materials on an insulating substrate (22) using two masking steps which do not require critical alignment even with close spacing between the elements. A first masking layer (24; see FIG. 10) e.g. of photoresist is formed on the upper surface of at least the body (21) to determine by a lift-off technique a metallization pattern (35, 36; see FIG. 13) on the body (21) and the substrate (22). A second masking layer (44) e.g. of photoresist is then provided to determine by ion-bombardment through windows (45) of this layer (44) the desired pattern of elements and their electrodes. The ion-bombardment permits removal of exposed areas of not just the body (21) and metallization pattern (35, 36) but also of a passivating layer on the body surfaces; a closely spaced group of elements and their electrodes can be obtained because the ion-bombardment results in steep sides without significant undercutting.
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申请公布号 |
US4310583(A) |
申请公布日期 |
1982.01.12 |
申请号 |
US19790059830 |
申请日期 |
1979.07.23 |
申请人 |
U.S. PHILIPS CORPORATION |
发明人 |
BAKER, IAN M.;WITHERS, RICHARD B. |
分类号 |
H01L21/302;H01L21/3065;H01L21/465;H01L21/467;H01L25/04;H01L27/146;H01L31/0264;(IPC1-7):B32B3/00 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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