发明名称 Method of adhesion of passivation layer to gold metalization regions in a semiconductor device
摘要 A method for adhering a passivation layer to gold regions in a semiconductor device. The method comprises the steps of providing a semiconductor device having at least one gold region formed thereon. A layer of a metal reactive with the gold is then deposited over the gold region so as to form a gold-reactive metal interface region. The gold and metal are then reacted at the interface region. Any metal which does not react is removed so as to expose a reacted interface region. Finally, a layer of passivation material is deposited over the exposed reacted interface region. Because the passivation material is then in contact with reacted gold regions, its adherence thereto is substantially increased.
申请公布号 US4310569(A) 申请公布日期 1982.01.12
申请号 US19800128622 申请日期 1980.03.10
申请人 TRW INC. 发明人 HARRINGTON, ALAN L.
分类号 H01L21/768;H01L21/31;H01L21/60;H01L23/485;H01L23/532;(IPC1-7):H01L21/48;H01L21/28 主分类号 H01L21/768
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