| 摘要 |
PURPOSE:To perform a noncontact, high-precise measurement of roughness, by a method wherein a regular reflection strength is measured by means of a reflection wave, a roughness information on a shape frequency is found from a roughness information on a shape amplitude of a measured surface and a light and dark pattern of an optical image. CONSTITUTION:Through the projection of an electromagnetic flux to a surface to be measured, a half power width H of a reflection strength distribution of a reflection wave from the surface to be measured and a regular reflection strength I are measured, and the value of a dispersion sigma of a height distribution, which is a roughness information on the shape amplitude of the surface to be measured, is found from said measurements by means of a formulas I. By means of television camera, photodiode arrays, and other two dimensional image receiving devices, the image of the surface to be measured, is taken. A parameter, representing a frequency information on the brightness of an optical image, is found from the light and drak pattern of the optical image of the surface to be measured through the measurement of a self-correlation length, or the measurement of the number of peaks per unit length, and the self-correlation length T is found. Through the combination of the two results, the roughness can be measured by a noncontact means and at high precision. |
