| 摘要 |
PURPOSE:To obtain the photodiode having excellent performance by conducting no heat treatment at respective period after a CdS film, a CdTe film and a Te film are laminated. CONSTITUTION:A transparent conductive film 2 in In2O3, etc. is formed on a light transmitting substrate 1 in soda glass, etc. according to a spray method, the CdS film 3 is laminated on the film 2 according to a sputtering method, etc. and heat treatment is not conducted after laminating. The CdTe film 4 is laminated on the film 3 according to the sputtering method, etc., and heat treatment is not conducted after laminating. The Te film is laminated on the CdTe film according to the sputtering method, keeping the temperature of the substrate at 500 deg.C or lower, and heat treatment is not conducted after laminating. An ohmic electrode 6 in gold, Al, etc. is formed on the film 5 according to evaporation, etc. Accordingly, this method has no thermal harmful influence on the Te film because heat treatment is not conducted to the CdS film, the CdTe film and the Te film. Thus, the increase of dark currents or the deterioration of a switching characteristic can be prevented. |
