VAPOR PHASE GROWING METHOD OF COMPOUND SEMICONDUCTOR AND ITS VAPOR PHASE GROWING APPARATUS,申请号JP19800077390-传众专利搜索

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发明名称	VAPOR PHASE GROWING METHOD OF COMPOUND SEMICONDUCTOR AND ITS VAPOR PHASE GROWING APPARATUS
摘要
申请公布号	JPS573797(A)	申请公布日期	1982.01.09
申请号	JP19800077390	申请日期	1980.06.09
申请人	FUJITSU LTD	发明人	NAKAI KENYA
分类号	C30B25/14;C30B25/02;C30B29/40;H01L21/205	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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