| 摘要 |
PURPOSE:To measure the circuit width accurately by placing a photoelectric scanner rotatable round an optical axis so that the focal plane coincides with the circuit plane on the substrate to be measured and utilizing its video signals. CONSTITUTION:A photoelectric scanner 3 which is made to rotate round an optical axis by a rotating mechanism 4 is placed so that the focal plane coincides with the plane of circuit 2 on the substrate 1 to be measured. Its video signals are received by a measuring section 6 and made to binary to measure the circuit width. At this time, the rotating mechanism 4 is controlled by a controlling section 5 to make 180 measurements changing the direction of scan by 1 deg.. The circuit width is obtained by finding the minimum value out of 180 measurements by a discriminating section 7. By this measuring method, accurate measurement can be effected without influenced by fatigue of measures or personal difference. |
