| 摘要 |
PURPOSE:To optimize feedback gain highly precisely at high speed by measuring the characteristics between control deviation and an actuator and between the actuator and a table, and constituting the optimum model by using said two characteristics. CONSTITUTION:A displacement input signal 1 is outputted from a digital computer 19 via a high speed analog output device 17. Said displacement input signal 1 is compared with displacement, speed, and acceleration feedback signals 14, 15, and 16. The result is inputted to a servoamplifier gain 3 as a control deviation signal 2, transmitted to an actuator 5 through a servo valve 4, and actuates the table 8. After the vibration for a predetermined time, the digital computer 17 stops the output. The characteristics of the servo valve 4 and the actuator 5 are obtained, and the characteristics of the table 8 and a unit under test 7 are also obtained. With the stability being judged, the optimization computation of the gain can be performed. |
