| 摘要 |
PURPOSE:To increase electromotive force by providing many convex parts on a light receiving plane, forming a thin Schottky barrier metal layer on one surface of the convex part and thick Schottky barrier metal layer on the other surface, and attaching a surface electrode at a specified location. CONSTITUTION:An Si substrate 2 whose direction of crystal axis is <100> is anisotropically etched and the convex and cocave light recieving plane 4 having the height of about 10mum is formed in the direction of <111>. Then the substrate 2 is held at theta=45 deg.-20 deg., and the Schottky barrier metal is evaporated. Then, the thick film 5'' is provided on one surface of the convex part, and the thin film 5' is provided on the other side thereof. Then a surface electrode 6 is provided in the concave part, and a bottom electrode 1 is provided on the substrate. In this constitution, the light receiving area is increased, and the transmission and the reflection are repeated on the Si substrate 2, and the incident light is fully utilized and converted into the light electromotive force. Therefore the output is increased. |
