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经营范围
发明名称
DRY ETCHING
摘要
申请公布号
JPH02218127(A)
申请公布日期
1990.08.30
申请号
JP19890038991
申请日期
1989.02.17
申请人
SHARP CORP
发明人
HIKITA TOMOYUKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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