| 摘要 |
PURPOSE:To enhance productivity by circulating automatically two working liquids with different concentrations so that the working liquid with proper concentration is supplied only to the gap which discharge processing shall be applied to. CONSTITUTION:A processing liquid circulation device 20, is provided composed of a low-concentration working liquid circulation device 55 and a high-concentration working liquid circulation device 50, from which jet is applied to the gap to be processed by discharge processing method. A pump 34 will fill the processing vessel 12 with low-concentration working liquid 56 while a pump 62 will send high- concentration working liquid 52 to a nozzle 54 provided at an electrode 22, and the gap between the electrode 22 and work 24 is filled with a working liquid having necessary concentration. The concentration of the working liquid 52 is measured by a measuring instrument 70, which is controlled according to the command from a control box 78. |
