发明名称 Batch placement system for electronic components or chips.
摘要 A batch chip placement system for batch positioning semiconductor chips, or the like, upon a substrate containing an array of chip sites or footprints whose actual position on the substrate deviates from the theoretical or nominal position over successive substrates. The positioning is achieved by first sensing the X and Y offsets of a pair of alignment marks on the substrate from their theoretical or nominal position to determine the DELTA X and DELTA Y correction factors required to obtain the actual X,Y position of the alignment marks. The actual X,Y position of the alignment marks is used to determine actual X,Y chip position values, theta rotation and shrinkage factor corrections required to obtain proper orientation and positioning for batch chip placement.
申请公布号 EP0042977(A1) 申请公布日期 1982.01.06
申请号 EP19810104009 申请日期 1981.05.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CACCOMA, GEORGE ANTHONY;KOESTNER, JOSEPH HENRY;O'NEILL, BRIAN COLLINS;TAPPEN, FRANK MUIR
分类号 H01L21/60;H01L21/67;H05K13/04;(IPC1-7):01L21/68;05K13/04 主分类号 H01L21/60
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