Apparatus for measuring volatile hydrides

摘要

According to the present invention volatile hydrides such as diborane, arsine, phosphine and the like are made to react with mercuric oxide at an ordinary temperature to produce mercury atoms, the concentration of which is thereafter measured and the concentration of volatile hydrides is determined in accordance with the corresponding measured mercury atom concentration. As the measuring apparatus according to the present invention is made to measure mercury atoms, it can easily detect even extremely small quantity of substances such as volatile hydrides and respond quickly, thus enabling the apparatus being suitably used as a monitor in the semiconductor industry.