发明名称 PIEZOELECTRIC WAFER MOVER
摘要 <p>Apparatus for effecting movement, translation and rotation, of an object relative to a reference, is disclosed, comprising transducer mean having a portion thereof fixed with respect to the reference and means frictionally coupling the transducer to the object for effecting movement thereof. In addition, means for applying a predetermined potential difference waveform to the transducer to accelerate the transducer with respect to the object is disclosed. The transducer is accelerated at an acceleration which exceeds the critical acceleration of the object with respect to the transducer thereby effecting relative motion therebetween and thereby, being capable of moving the object significantly further than the extent of movement of the transducer.</p>
申请公布号 CA1115813(A) 申请公布日期 1982.01.05
申请号 CA19790338738 申请日期 1979.10.30
申请人 SPERRY CORPORATION 发明人 THAXTER, JAMES B.
分类号 H01L21/027;H01L21/30;H01L21/68;H01L41/09;H02N2/00;(IPC1-7):05D3/00 主分类号 H01L21/027
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