| 摘要 |
PURPOSE:To facilitate judgement of whether the deviations between respective layers are within standard or not without being affected by dimensional deviations by using specific patterns. CONSTITUTION:Reference lines 3 positioned at the transverse center of the pattern 1 for checking the registration accuracy of a 1st layer are formed by each piece vertically and horizontally to said pattern. Reference lines 4 positioned at he transverse center of the pattern 2 for checking the registration accuracy of the 2nd layer are formed by each two pieces vertically and horizontally to said patterns. The deviation between the two layers is judged to be within the standard if the lines 3 exist in the region sandwiched by the lines 4. The deviation is judged to be off the standard if the lines 3 is off the region sandwiched by the lines 4. The positions of the reference lines do not change even if the widths of the respective layers change according to these patterns and, therefore, only the positional deviation can be checked without being affected by the dimensional deviation. |
