| 发明名称 |
High pressure plasma hydrogenation of silicon tetrachloride |
| 摘要 |
A method is disclosed for the plasma hydrogenation of silicon tetrachloride. A high pressure plasma is utilized to effect a reaction of hydrogen and silicon tetrachloride to form trichlorosilane and other hydrogenated silicon chlorides.
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| 申请公布号 |
US4309259(A) |
申请公布日期 |
1982.01.05 |
| 申请号 |
US19800148094 |
申请日期 |
1980.05.09 |
| 申请人 |
MOTOROLA, INC. |
发明人 |
SARMA, KALLURI R.;RICE, JR., M. JOHN |
| 分类号 |
B01J12/00;C01B33/107;(IPC1-7):C01B33/10 |
主分类号 |
B01J12/00 |
| 代理机构 |
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