| 摘要 |
PURPOSE:To measure terminal points of an objective material with high resolving power by dividing finely in an analog manner not only existence of an interception of a laser beam by a product to be measured but also a condition of the interception. CONSTITUTION:A pair of detecting heads 6 and 6' performing a measurement in the direction of a laser beam, i.e. in the vertical direction are attached to a horizontally moving arm 5. The horizontally moving arm 5 is drived with a driving motor along a guide 16 for a linear movement. A moved position of the horizontally moving arm 5 is always monitored by a position detector 18. High precision servosystems 11, and 11' that are movable parts of the detecting arm 6 and 6' are composed of an incremental or absolute encoder. Probes 12 and 12' attaching to said servo systems 11 and 11' are allowed to contact with an objective material 4 and a manner of contact and a condition of the probes 12 and 12' are measured with a sensor attached to each probe. |
