发明名称 PYROLYTIC BORON NITRIDE COATED BOAT FOR METAL VAPORIZATION
摘要 <p>Resistance heated vaporization boats for the vacuum vaporization of metals are made by machining graphite stock to boat shape, encapsulating the boat in pyrolytic boron nitride and then exposing the graphite surfaces of the ends of the boat to provide electrical contact.</p>
申请公布号 CA1115604(A) 申请公布日期 1982.01.05
申请号 CA19790318961 申请日期 1979.01.02
申请人 UNION CARBIDE CORPORATION 发明人 SHINKO, JULIUS S.
分类号 C23C14/26;C04B41/50;C04B41/87;C23C14/24;(IPC1-7):23C13/12;04B35/54 主分类号 C23C14/26
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