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发明名称
METHOD OF FORMING SEMICONDUCTOR HETERO STRUCTURE
摘要
申请公布号
JPH0427115(A)
申请公布日期
1992.01.30
申请号
JP19900131153
申请日期
1990.05.23
申请人
FUJITSU LTD
发明人
KODAMA KUNIHIKO;OTSUKA NOBUYUKI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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