| 摘要 |
Cathode sputtering apparatus for coating articles which are rotated within a vacuum sputtering chamber and which are electrically biased includes a shaft for supporting the articles to be coated, wherein the shaft is supported by a plurality of non-lubricated bearings disposed within the vacuum chamber, at least one of the bearings being designed to conduct electricity to the shaft, that bearing being a thrust bearing supported by and in electrical contact with a bearing support plate and having races and rolling elements preferably made from either molybdenum or tungsten which are very hard materials with low electrical resistivity.
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