| 摘要 |
PURPOSE:To provide a small-sized simple device capable of producing a current density sufficient to form the thin film of a high purity by providing an ion-beam generator of the type of evaporating a material in an electric field and an electron lens system for focusing ion beams. CONSTITUTION:A material to be ionized, for example gold, is grounded or maintained at a positive potential of several tens - several hundreds V against a substrate to be coated with a thin film of gold, by a power source 7, and is kept in a molten state. When a negative high voltage of several KV is supplied from a high- voltage source 3 to a drawing-out electrode 11 in the above conditions, gold ions are drawn out and the ion beam IB is focused on the substrate 6 by using the electron lens sytem 13. For example, when the lens system 13 is composed of an electrode 11 and a grounding electrode 12 and an electric field is provided in the direction toward the center axis of deceleration, the path of the beam IB is once expanded in diameter and then focused. The beam thus focused is irradiated onto the substrate 6, whereby the thin film of gold can be obtained. |
