发明名称 SILICON MANUFACTURE
摘要 <p>A method of producing silicon comprising producing a plasma in a gas flow laden with at least one silicon compound so that the silicon compound is reduced or decomposed to silicon and transporting the silicon which may have reacted with other material if present in the plasma and reaction products out of the plasma in the gas flow.</p>
申请公布号 JPS56169118(A) 申请公布日期 1981.12.25
申请号 JP19810046611 申请日期 1981.03.31
申请人 LICENTIA GMBH 发明人 RAINHARUTO DAARUBERUKU
分类号 B01J12/00;C01B31/36;C01B33/02;C01B33/027;C01B33/06;C23C16/513;C30B25/02;C30B25/18;H01L31/18;H05H1/34;H05H1/42 主分类号 B01J12/00
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