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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04326567(A)
申请公布日期
1992.11.16
申请号
JP19910096493
申请日期
1991.04.26
申请人
NEC CORP
发明人
HIROTA TOSHIYUKI
分类号
H01L21/316;H01L21/318;H01L21/822;H01L27/04
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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