| 摘要 |
PURPOSE:To give an accurate decision of quality to an object to be inspected, by irradiating a laser beam linearly on the surface of the object to be inspected in a way like a scan and detecting a change of the reflected light or transmitted light to carry out an inspection for the surface flaws of the object to be inspected. CONSTITUTION:In case an inspection is given to the side surface of a cylinder, an object 4 to be inspected is turned in a certain speed on rollers 5a and 5b. Then a laser beam 2 given from a laser device 1 is projected by a vibrating mirror 3, and the reflected light given from the side surface of the object 4 is condensed on the light receiving surface of a photodetector 8. The output of the detector 8 is led to a signal processor 9 to carry out a decision of flaws, measurement of the flaw area, a decision of quality and others. The processor 9 consists of a normal surface diciding circuit 10, an AND gate 11 and a counting device 12 plus a storage/arithmetic device 13 which stores the signals equivalent to the flawless area of the object 4 and calculates both the length and the flaw area of the object 4 by means of the above-mentioned signals, and others. |
