MONOCHROMATIC LENS FOR PROJECTION PHOTOLITHOGRAPHY,申请号SU19772541514-传众专利搜索

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发明名称	MONOCHROMATIC LENS FOR PROJECTION PHOTOLITHOGRAPHY
摘要
申请公布号	SU892399(A1)	申请公布日期	1981.12.23
申请号	SU19772541514	申请日期	1977.11.09
申请人	BOBROV SERGEJ T,SU;KOTLETSOV BORIS N,SU;TURKEVICH YURIJ G,SU	发明人	BOBROV SERGEJ T,SU;KOTLETSOV BORIS N,SU;TURKEVICH YURIJ G,SU
分类号	G02B19/00;(IPC1-7):G02B19/00	主分类号	G02B19/00
代理机构		代理人
主权项
地址

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