| 摘要 |
PURPOSE:To perform an inspection of the highly integrated circuit highly speedily and surely by a method wherein an electron beam is irradiated to a point decided from a scanned picture of the circuit, and the potential response wave form of the irradiated point is indicated with a secondary electronic signal generated when a periodic signal is supplied to the circuit. CONSTITUTION:The inspecting sample 6 in a vacuum vessel 1 is scanned by the electron beam 3, and the scanned picture of the circuit is indicated on a cathode-ray tube 14 synchronized with the scanning beam to decide the inspecting point on the circuit, for example point A, from the scanned picture. By standing a light pen 23 on the A point, deflecting coils 5X, 5Y are held at potentials to irradiate the A point, and the beam 3 is irradiated to the A point consecutively or pulsatively. At this time, by applying a DC voltage and the periodic signal to the circuit and making the cathode-ray tube 14 to scan synchronizing with the periodic signal, the secondary electronic signal corresponding to potential change of the A point is indicated on the cathode-ray tube 14 as the response wave form. Accordingly the response wave form of the desired point in the highly integrated circuit can be indicated highly speedily and surely. |
